Spiral Inductor Coils

The SemiGen Spiral Inductor Coils are manufactured using our thin film process on quartz substrates. The precision photolithography and non-chemical etching process provides clean edges to assure uniformity from coil to coil. By using quartz and applying a polyimide coating we produce a device that eliminates the need for conformal coating or staking. Inductors can be epoxied down with nonconductive epoxy and the wire bonded for connection.

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Spiral Inductor Coils

Dimensions: Inches

Part # DIM "A" MAX DIM "B" MAX DIM "C" MAX
SG100 .030 .030 .012
SG101 .030 .030 .012
SG102 .040 .040 .012
SG103 .040 .040 .012
SG104 .040 .040 .012
SG105 .045 .045 .012
SG106 .055 .055 .012
SG107 .065 .065 .012
SG108 .075 .075 .012
SG109 .085 .085 .012

 

 

Spiral Inductors

Part # Turns Nominal
(nH)
Inductance
Min.
(nH)
Inductance
Max.
(nH)
Max. DC
Resistance
(Ohms)
Min. Q
@
100 MHz
Min. Self
Resonant
Frequency
(GHz)
Max.
Current
(mA)
10450Q 4.5 7.5 6 9 15 5 20 100
10350Q 3.5 4.5 4 6 8 10 20 100
10250Q 2.5 2.5 2 3.5 5 10 20 100

 

Spiral Inductors

Model # of Turns Inductance
Ls (ηH)
MIN/ TYP/MAX
RsDC Rs1GHz Q @ FT
MIN/MAX
Test Frequency,
FT(GHz)
Resonant Frequency,
FR(GHz)
SG100 1.5 1.0/1.5/2.0 8.5 1.0 60/75 1.5 4.0
SG101 2.5 2.0/2.3/2.6 1.0 1.4 50/60 1.5 3.6
SG102 3.5 3.6/4.2/5.0 1.15 2.0 40/45 1.5 3.2
SG103 4.5 5.0/7.5/9.0 1.75 3.5 37/43 1.5 2.3
SG104 5.5 8.0/10/12.0 1.85 3.75 33/38 1.0 2.05
SG105 7.5 15/20/25 2.4 4.25 27/33 0.5 1.85
SG106 9.5 32/40/48 4.0 70 23/27 0.5 1.4
SG107 12.5 80/90/100 9.5 22 18/24 0.5 0.975
SG108 15.5 150/200/250 16.5 36 14/18 0.5 0.460
SG109 18.5 250/300/350 20 42 10/15 0.5 0.250

Features:

  • No need for “Staking” Coil
  • Passivated Protective Coating Over Coil
  • Dimensional Uniformity
  • Planar Solid Structure Coil
  • Gold thickness up to 6 microns for high Q
  • Lines and Spaces down to 10 microns
  • Vertical etch process insures chip-to-chip and lot-to-lot repeatability
  • Ti/Pt/Au on both sides, which allows for high temperature use
  • Polished Quartz (.015 thick) with very low loss tangent and dielectric constant for 18 GHz applications.

Applications

For use in Attenuators, Amplifiers, Switches and Filters in replacement of conventional wound coils. Operating frequency is up to 20GHz.

 

Downloads:

 

Thin Film Circuit Design Guidelines Provide Keys to Successful Layout of Ion Beam Etched Circuits
Resource

Thin Film Circuit Design Guidelines Provide Keys to Successful Layout of Ion Beam Etched Circuits

Tech Brief Helps Make Critical Thin Film Manufacturing Decision
Resource

Tech Brief Helps Make Critical Thin Film Manufacturing Decision

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