Thin Film Processing

SemiGen’s custom thin film fabrication technology utilizes a process called ion beam etching to provide tighter tolerance and improved performance. Our custom metallization capability allows us to provide titanium, platinum, and gold as a standard metal, which provides excellent eutectic value and a robust bond strength. Many other metal schemes are available and used throughout our processing. We deposit films internally using either sputtered or evaporated vacuum systems and plated gold for finishes that are superior for bonding RF circuits.

 

SemiGen fabricates custom filters, lange couplers, circuits, stand offs, terminations, planar and spiral inductors and many other types of thin film RF/microwave Circuits.

 

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We can fabricate circuits on a variety of materials:

  • Alumina
  • Beryllium
  • Aluminum Nitride
  • Fused Silica
  • Ferrite
  • Glass
  • Silicon
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